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High Vacuum Sliding-Rail Tube Furnace

SERIES CODE: TF1000-250-HV-SL

High vacuum sliding rail tube furnace featuring a motorized horizontal movement device for precision positioning of the heating chamber.

High Vacuum Sliding-Rail Tube Furnace
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The TF1000-250HV-SL high vacuum tube furnace utilizes far-infrared heating, with high-purity quartz tubes (dehydroxylated). This equipment consists of a vacuum system, heating element, horizontal movement device, electrical control system, and water cooling system. It is primarily suitable for vacuum annealing processes of semiconductor devices, vacuum brazing, vacuum degassing, refining and heat treatment of metallic materials, and annealing and shaping of nickel-titanium materials in the medical industry.

Quick Specs

Temperature Range1000° C
Thermal Stability± 0.5°C
Heating Rate15°C/min
Internal Volume24 Liters

Tutorial

High Vacuum Sliding-Rail Tube Furnace Tutorial

Technical Specifications

Furnace Dimensions
Heating Zone:Ø240 mm × 600 mm
Effective Working Zone:Ø240 mm × 350 mm
Equipment Footprint:Approximately 1000 mm × 2850 mm × 1400 mm
Thermal Performance
Maximum Temperature:1000°C
Continuous Operating Temperature:950°C
Heating Power:21 kW
Installed Power:25 kW
Temperature Control Accuracy:±1°C
Temperature Uniformity:±5°C at 900°C after 60-minute soak under unloaded conditions
Maximum Heating Rate:Up to 20°C/min
Heating Elements:High-efficiency infrared heating tubes
Insulation System:Premium ceramic fiber insulation
Power Regulation:SCR-controlled power modulation
Temperature Measurement:N-type armored thermocouple
Control Method:Intelligent PID automatic adjustment
Vacuum System
Ultimate Vacuum (Cold State):≤ 2 × 10⁻⁴ Pa
Ultimate Vacuum (Hot State):≤ 2 × 10⁻³ Pa at 800°C
Measurement Range:Atmospheric pressure to 1 × 10⁻⁵ Pa
Mechanical Pump Capacity:8 m³/h
Turbomolecular Pump Speed:600 L/s
Pump-Down Time:≤ 20 minutes from atmosphere to 2 × 10⁻³ Pa
Pressure Rise Rate:≤ 1 Pa/h

Cooling method: Natural cooling (≥600℃)

External air cooling: (<600℃)

Power supply: 25KW, three-phase five-wire, AC380V±10% 50HZ

Cooling gas and driving gas

  • Driving gas: Compressed air, 0.4-0.6MPa
  • Cooling gas: Nitrogen, purity better than 99.999%
  • Inflation pressure ≤5KPa

Water cooling: Inlet water temperature ≤35℃, 2.3T/h
Water pressure ≈0.1MPa

Delivery Cycle:
Standard production and commissioning lead time ranges from 7 to 30 working days, depending on system configuration and project requirements.

Features & Benefits

Motorised sliding rail for precision heating chamber positioning
Far-infrared circumferential heating, uniform temperature field
Oil-free turbomolecular pump, no diffusion pump warm-up needed
Controlled vacuum environment for clean processing
Ergonomic design supporting frequent operation
Reliable heating performance for repeated experiments
Integrated safety protection systems

Customer Cases

Customer Case 1
Customer Case 2
Customer Case 3
Customer Case 4

Need a Custom Configuration?

Contact Our Engineers.

Our engineering team can tailor chamber sizes, atmospheric controls, and software integration to your exact specs.

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High Vacuum Sliding-Rail Tube Furnace

TF-SERIES (LABORATORIES FURNACES) SERIES