Vacuum Tube Furnace
Compact, small chamber vacuum systems engineered for R&D and thermal Analysis. The furnace tubes are made of high-purity quartz.
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Technical Specifications
Furnace Dimensions | |
| Heating Zone: | Ø180 mm × 400 mm |
| Effective Working Zone: | Ø180 mm × 200 mm |
| Equipment Footprint: | Approx. 1000 mm × 1650 mm × 1400 mm |
Thermal Performance | |
| Maximum Temperature: | 1000°C |
| Operating Temperature: | Up to 950°C |
| Heating Power: | 12 kW |
| Installed Power: | 15 kW |
| Temperature Control Accuracy: | ±1°C |
| Temperature Uniformity: | ±5°C at 900°C after 60 minutes soaking (unloaded condition) |
| Maximum Heating Rate: | Up to 20°C/min (unloaded) |
| Heating Configuration: | 360° circumferential heating |
| Insulation System: | High-purity ceramic fiber insulation |
| Temperature Measurement: | N-type thermocouple with direct chamber monitoring |
Vacuum System | |
| Ultimate Vacuum (Cold): | ≤ 2 × 10⁻⁴ Pa |
| Ultimate Vacuum (Hot): | ≤ 2 × 10⁻³ Pa at 800°C |
| Vacuum Measurement Range: | Atmospheric pressure to 1 × 10⁻⁵ Pa |
| Fore Pump Capacity: | 8 m³/h |
| Turbomolecular Pump Speed: | 600 L/s |
| Pump-Down Time: | ≤ 20 minutes from atmosphere to 2 × 10⁻³ Pa |
| Pressure Rise Rate: | ≤ 1 Pa/h |
Cooling method: Natural cooling (≥600℃)
Power supply: 15KW, three-phase five-wire, AC380V±10%, 50HZ
Cooling gas and driving gas: Compressed air, 0.4-0.6MPa, Nitrogen, purity better than 99.999%, Inflation pressure ≤5KPa
Water Cooling: Inlet water temperature ≤35℃, Water pressure ≈0.1MPa
Delivery Time
Standard manufacturing and commissioning lead time: 7–30 working days, depending on configuration and customer requirements.
Features & Benefits
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Our engineering team can tailor chamber sizes, atmospheric controls, and software integration to your exact specs.
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