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TF1000-200HV

SERIES CODE: TF

Compact, small chamber vacuum systems engineered for R&D and thermal Analysis. The furnace tubes are made of high-purity quartz.

TF1000-200HV
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The TF1000-200HV high vacuum tube furnace utilizes far-infrared heating, with high-purity quartz tubes (dehydroxylated). This equipment consists of a vacuum system, heating element, electrical control system, and water cooling system. It is primarily suitable for vacuum annealing processes of semiconductor devices, vacuum brazing, vacuum degassing, refining and heat treatment of metallic materials, and annealing and shaping of nickel-titanium materials in the medical industry.

Quick Specs

Temperature Range≤1000° C
Thermal Stability± 0.5°C
Heating Rate15°C/min
Internal Volume24 Liters

Tutorial

TF1000-200HV Tutorial

Technical Specifications

Furnace Dimensions

Heating Zone:Ø180 mm × 400 mm
Effective Working Zone:Ø180 mm × 200 mm
Equipment Footprint:Approx. 1000 mm × 1650 mm × 1400 mm

Thermal Performance

Maximum Temperature:1000°C
Operating Temperature:Up to 950°C
Heating Power:12 kW
Installed Power:15 kW
Temperature Control Accuracy:±1°C
Temperature Uniformity:±5°C at 900°C after 60 minutes soaking (unloaded condition)
Maximum Heating Rate:Up to 20°C/min (unloaded)
Heating Configuration:360° circumferential heating
Insulation System:High-purity ceramic fiber insulation
Temperature Measurement:N-type thermocouple with direct chamber monitoring

Vacuum System

Ultimate Vacuum (Cold):≤ 2 × 10⁻⁴ Pa
Ultimate Vacuum (Hot):≤ 2 × 10⁻³ Pa at 800°C
Vacuum Measurement Range:Atmospheric pressure to 1 × 10⁻⁵ Pa
Fore Pump Capacity:8 m³/h
Turbomolecular Pump Speed:600 L/s
Pump-Down Time:≤ 20 minutes from atmosphere to 2 × 10⁻³ Pa
Pressure Rise Rate:≤ 1 Pa/h

Cooling method: Natural cooling (≥600℃)

Power supply: 15KW, three-phase five-wire, AC380V±10%, 50HZ

Cooling gas and driving gas: Compressed air, 0.4-0.6MPa, Nitrogen, purity better than 99.999%, Inflation pressure ≤5KPa

Water Cooling: Inlet water temperature ≤35℃, Water pressure ≈0.1MPa

Delivery Time
Standard manufacturing and commissioning lead time: 7–30 working days, depending on configuration and customer requirements.

Features & Benefits

Far-infrared circumferential heating for a uniform temperature field
High vacuum capability for contamination-free processing
Rapid heating response
Reliable thermal stability for sensitive material processing
Precision temperature control ensuring repeatable laboratory results
Compact system footprint suitable for research environments
Programmable process control

Customer Cases

Customer Case 1
Customer Case 2
Customer Case 3
Customer Case 4

Need a Custom Configuration?

Contact Our Engineers.

Our engineering team can tailor chamber sizes, atmospheric controls, and software integration to your exact specs.

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TF1000-200HV

TF SERIES SERIES